Pumping gases by a silicon micro pump with dynamic passive valves

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 357-360

  Gerlach, Torsten ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PRESSURE MEASUREMENT; VALVES (MECHANICAL);

MEMBRANE RESONANCE;

PUMPS;

EID: 0030692163     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)