Silicon membrane micropump with integrated bimetallic actuator

Chinese Journal of Electronics

Volumn 5, Issue 2, 1996, Pages 29-35

  Zhan, Changqing ^a   Lo, Taichin ^a   Liu, Litian ^a   Tsien, Peihsin ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM; DIAPHRAGMS; MICROMACHINING; PUMPS; SEMICONDUCTING SILICON; VALVES (MECHANICAL);

INTEGRATED BIMETALLIC ACTUATOR; SILICON CHIPS; SILICON DIAPHRAGM; SILICON MEMBRANE MICROPUMP;

MICROELECTROMECHANICAL DEVICES;

EID: 0030261269     PISSN: 10224653     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)