Single-chip multiple-frequency VHF low-impedance micro piezoelectric resonators

IEEE Electron Device Letters

Volumn 27, Issue 4, 2006, Pages 246-248

  Yan, Le ^a   Pang, Wei ^b   Kim, Eun Sok ^b   Tang, William C ^a  

^a University of California at Irvine   (United States)

^b University of Southern California   (United States)

Author keywords

Impedance; Microelectromechanical system (MEMS); Piezoelectric; Resonator; Wireless communication

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUIT TESTING; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; WIRELESS TELECOMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL SYSTEM (MEMS); MULTIPLE-FREQUENCY MICROMECHANICAL RESONATORS; PIEZOELECTRIC RESONATORS; PIEZOELECTRIC TRANSDUCTION MECHANISM;

MICROELECTROMECHANICAL DEVICES;

EID: 33645641572     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2006.871881     Document Type: Article

References (12)

1. J. Wang, Z. Ren, and C. T.-C. Nguyen, "1.156-GHz self-aligned vibrating micromechanical disk resonator," IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 51, no. 12, pp. 1607-1628, Dec. 2004.
2. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Micromechanical 'hollow-disk' ring resonators," in Proc. 17th IEEE Int. Conf. Micro Electro Mech. Syst., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 821-824.
3. B. Bircumshaw, G. Liu, H. Takeuchi, T.-J. King, R. T. Howe, O. Reilly, and A. Pisano, "The radial bulk annular resonators: Towards a 50 ohm RP MEMS filter," in Proc. 12th Int. Conf. Solid State Sens., Actuators, Microsyst., Boston, MA, Jun. 8-12, 2003, pp. 875-878.
4. Y. Lin, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps," in Proc. IEEE Int. Freq. Control Symp. and Expo., Aug. 29-31, 2005, pp. 128-134.
5. S. Bhave and R. T. Howe, "Silicon nitride-on-silicon bar resonator using internal electrostatic transduction," in Proc. 13th Int. Conf. Solid-State Sens., Actuators, Microsyst., Seoul, Korea, Jun. 5-9, 2005, pp. 2139-2142.
6. R. Ruby, P. Bradley, D. Clark, D. Feld, T. Jamneala, and K. Wang, "Acoustic FBAR for filters, duplexers and front end modules," in Proc. IEEE Microw. Symp. Dig., 2004, pp. 931-934.
7. L. Yan, J. Wu, and W. C. Tang, "A 1.14 Ghz piezoelectrically transduced disk resonator," in Proc. 18th IEEE Int. Conf. Micro Electro Mech. Syst., Miami, FL, Jan. 30-Feb. 3, 2005, pp. 203-206.
8. R. A. Johnson, Mechanical Filters in Electronics. New York: Wiley, 1987, pp. 96-97.
9. S. S. Rao, Mechanical Vibrations, 3rd ed. Reading, MA: Addison-Wesley, 1995, p. 512.
10. L. Yan, W. Pang, J. Wu, W. C. Tang, and E.-S. Kim, "High frequency micromechanical piezo actuated disk resonator," in Proc. Solid-State Sens., Actuators, Microsyst. Workshop, Hilton Head Island, SC, Jun. 6-10, 2004, pp. 372-375.
11. W. Pang, H. Yu, H. Zhang, and E. S. Kim, "Temperature compensated film bulk acoustic resonator above 2 Ghz," IEEE Electron Device Lett., vol. 26, no. 6, pp. 369-371, Jun. 2005.
12. W. Pang, H. Zhang, H. Yu, and E. S. Kim, "Electrically tunable and temperature compensated film bulk acoustic resonator," in Proc. IEEE Int. Microw. Tech. Symp., Long Beach, CA, Jun. 24-27, 2005, pp. 1279-1282.