Electrically tunable and temperature compensated FBAR

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 1279-1282

  Pang, Wei ^a   Yu, Hongyu ^a   Zhang, Hao ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

Electrical tuning; FBAR; Surface micromachined tunable capacitor; Temperature compensation

Indexed keywords

ELECTRICAL TUNING; FBAR; SURFACE MICROMACHINED TUNABLE CAPACITOR; TEMPERATURE COMPENSATION;

ACTUATORS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; THERMAL EFFECTS; TUNING;

ACOUSTIC RESONATORS;

EID: 33749250033     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516911     Document Type: Conference Paper

References (7)

1. T. W. Grudkowski, J. F. Black, T. M. Reeder, D. E. Cullen, and R. A. Wagner, "Fundamental-mode VHP/UHF minature acoustic resonators and filters on silicon," Appl. Phys. Lett., vol. 37, pp. 993-995, 1980.
2. K.M. Lakin and J.S. Wang, "Acoustic wave bulk composite resonators," Appl. Phys. Lett., vol. 38, pp. 125-127, 1981.
3. 2 diaphragm composite resonator on a silicon wafer," Electron. Lett., vol. 17, pp. 507-509, 1981.
4. R. Ruby and P. Merchant, "Micromachined Thin Film Bulk Acoustic Resoantors," in Proc. IEEE Int. Freq. Contr. Symp., 1994, pp. 135-138.
5. J.D. Larson III, R. Ruby, P. Bradley, J. Wen, Shong-Lam Kok, and A. Chien, "Power handling and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band," in Proc. IEEE International Ultra. Sym., 2000, pp. 869-874.
6. T. Yokoyama, T. Nishihara, S. Taniguchi, M. Iwaki, Y. Satoh, M. Ueda, and T. Miyashita, "New Electrode Material for Low-loss and High-Q FBAR Filters," in Proc. IEEE International Ultra. Sym., To be published, 2004.
7. T.G.S. M.Rijks, J.T.M.van Beek, P.G. Steeneken, M.J.E. Ulenaers, J. De Coster, and R. Puers, "RF MEMS tunable capacitors with large tuning ratio," in Proc. IEEE International Micro Electro Mechanical Systems Conference, 2004, pp. 777-780.