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Volumn , Issue , 2005, Pages 203-206

A 1.14 GHZ piezoelectrically transduced disk resonator

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRODES; ELECTROSTATICS; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SILICON ON INSULATOR TECHNOLOGY; TUNING;

EID: 26844442736     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (20)

References (8)
  • 3
    • 17044424049 scopus 로고    scopus 로고
    • Dry-released post-CMOS compatible contour-mode aluminum nitride micromechanical resonators for VHF applications
    • Hilton Head Island, SC, Jun. 6-10
    • G. Piazza and A. P. Pisano, "Dry-released post-CMOS compatible contour-mode aluminum nitride micromechanical resonators for VHF applications," Tech. Dig., Solid-State Sensor, Actuator and Microsyst. Workshop, Hilton Head Island, SC, Jun. 6-10, 2004, pp. 37-40.
    • (2004) Tech. Dig., Solid-state Sensor, Actuator and Microsyst. Workshop , pp. 37-40
    • Piazza, G.1    Pisano, A.P.2
  • 5
    • 0037445453 scopus 로고    scopus 로고
    • The compatibility of ZnO piezoelectric film with micromachining process
    • T. Xu, G. Wu, G. Zhang, and Y. Hao, "The compatibility of ZnO piezoelectric film with micromachining process," Sensors and Actuators A: Physical, Vol. 104, pp. 61-67, 2003.
    • (2003) Sensors and Actuators A: Physical , vol.104 , pp. 61-67
    • Xu, T.1    Wu, G.2    Zhang, G.3    Hao, Y.4
  • 6
    • 0000267361 scopus 로고
    • Contour vibrations of isotropic circular plates
    • M. Onoe, "Contour vibrations of isotropic circular plates", J. Acoust. Soc. Am., Vol. 28, pp. 1158-1162, 1945.
    • (1945) J. Acoust. Soc. Am. , vol.28 , pp. 1158-1162
    • Onoe, M.1
  • 8
    • 0035871583 scopus 로고    scopus 로고
    • A novel suspended type thin film resonator (SFTR) using the SOI technology
    • H. Kim, B. Ju, Y. Lee, S. Lee, J. Lee and S. Kim, "A novel suspended type thin film resonator (SFTR) using the SOI technology," Sensors and Actuators A: Physical, Vol. 89, pp. 255-258, 2001.
    • (2001) Sensors and Actuators A: Physical , vol.89 , pp. 255-258
    • Kim, H.1    Ju, B.2    Lee, Y.3    Lee, S.4    Lee, J.5    Kim, S.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.