Comparison of properties of Pt/PZT/Pt and Ru/PZT/Pt ferroelectric capacitors

Chinese Physics Letters

Volumn 23, Issue 4, 2006, Pages 1042-1045

  Jia, Ze ^a   Ren, Tian Ling ^a   Liu, Tian Zhi ^a   Hu, Hong ^a   Zhang, Zhi Gang ^a   Xie, Dan ^a   Liu, Li Tian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTRODES; FERROELECTRIC FILMS; FERROELECTRICITY; INTERFACES (MATERIALS); PLATINUM; RUTHENIUM; SOL-GEL PROCESS; SOL-GELS; TITANIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

ELECTRODE INTERFACE; FERROELECTRIC CAPACITORS; LEAKAGE CURRENT DENSITYS; PROPERTY; PZT FILM; REMANENTS; SATURATED POLARIZATION; SI SUBSTRATES; SOL-GEL SPIN COATING; TOP-ELECTRODE MATERIALS;

POLARIZATION;

EID: 33645542768     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/23/4/078     Document Type: Article

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