Nanofabrication module integrated with optical aligner

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 2, 2006, Pages 539-542

  Stuart, Colin ^a   Xu, Qianfei ^a   Tseng, Ricky J ^a   Yang, Yang ^a   Hahn, H Thomas ^a   Chen, Yong ^a   Wu, Wei ^b   Williams, R Stanley ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHIC PATTERNS; LOW-COST TECHNIQUE; NANOSCALE PATTERNS;

COSTS; FABRICATION; MICROOPTICS; OPTICAL PROPERTIES;

PHOTOLITHOGRAPHY;

EID: 33645511602     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2166861     Document Type: Article

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