Temperature dependence of the tunnel-emission conduction current in metal-ZrO2-silicon capacitor structures

Journal of the Electrochemical Society

Volumn 153, Issue 1, 2006, Pages

  Wang, Ming Tsong ^a   Wang, Tsung Hong ^a   Cheng, Bonds Yi Yi ^a   Lee, Joseph Ya Min ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTRODES; PERMITTIVITY; THERMAL EFFECTS; ZIRCONIA;

ELECTRICAL CONDUCTION MECHANISM; METAL-INSULATOR-SEMICONDUCTOR CAPACITORS; SILICON CAPACITORS;

CAPACITORS;

EID: 33645510067     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2129279     Document Type: Article

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