Silicon nanowires by aluminum-induced crystallization of amorphous silicon

Electrochemical and Solid-State Letters

Volumn 9, Issue 2, 2006, Pages

  Zou, Min ^a   Cai, Li ^a   Wang, Hengyu ^a   Xu, Jiashou ^a  

^a University of Arkansas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; AMORPHOUS SILICON; CRYSTALLIZATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; SILICON; STRESS ANALYSIS; THERMAL EFFECTS;

AL DEPOSITION PARAMETERS; ALUMINUM-INDUCED CRYSTALLIZATION (AIC); SILICON NANOWIRES (SINW); STRESS ADJUSTMENT;

NANOSTRUCTURED MATERIALS;

EID: 33645505793     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2139979     Document Type: Article

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