A single-chip CMOS micro-hotplate array for hazardous-gas detection and material characterization

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 47, Issue , 2004, Pages

  Barrettino, D ^a   Graf, M ^a   Hafizovic, S ^a   Taschini, S ^a   Hagleitner, C ^a   Hierlemann, A ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP COMMUNICATION; DIGITAL TEMPERATURE; MATERIAL CHARACTERIZATION; MICRO-HOTPLATE ARRAY;

ADCOCK DIRECTION FINDERS; ALUMINUM METALLOGRAPHY; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROMIGRATION; FIELD PROGRAMMABLE GATE ARRAYS; GAS DETECTORS; HEAT TRANSFER; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; POLYSILICON; RESISTORS; SENSORS; SIGNAL PROCESSING;

CMOS INTEGRATED CIRCUITS;

EID: 2442682750     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. D. Barrettino, M. Graf, M. Zimmermann, C. Hagleitner, A. Hierlemann, and H. Baltes, "A Micro-Hotplate-Based Monolithic CMOS Gas Sensor Array," Proc. of ISCAS, vol. 4, pp. 852-855, 2003.
2. D. Barrettino, W. H. Song, M. Graf, A. Hierlemann, and H. Baltes, "A Micro-Hotplate-Based Monolithic CMOS Thermal Analysis System," Proc. of ESSCIRC, pp. 329-332, 2003.