메뉴 건너뛰기




Volumn 53, Issue 2, 2006, Pages 483-491

CMUTS with dual-electrode structure for improved transmit and receive performance

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); DUAL-ELECTRODE STRUCTURE; TRANSMIT ELECTRODES;

EID: 33645068877     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1593388     Document Type: Article
Times cited : (38)

References (21)
  • 3
    • 8344253627 scopus 로고    scopus 로고
    • Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates
    • J. Knight, J. McLean, and F. L. Degertekin, "Low temperature fabrication of immersion capacitive micromachined ultrasonic transducers on silicon and dielectric substrates," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, pp. 1324-1333, 2004.
    • (2004) IEEE Trans. Ultrason., Ferroelect., Freq. Contr. , vol.51 , pp. 1324-1333
    • Knight, J.1    McLean, J.2    Degertekin, F.L.3
  • 4
    • 0033310090 scopus 로고    scopus 로고
    • Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers
    • A. Bozkurt, I. Ladabaum, A. Atalar, and B. T. Khuri-Yakub, "Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 46, pp. 1364-1374, 1999.
    • (1999) IEEE Trans. Ultrason., Ferroelect., Freq. Contr. , vol.46 , pp. 1364-1374
    • Bozkurt, A.1    Ladabaum, I.2    Atalar, A.3    Khuri-Yakub, B.T.4
  • 5
    • 0036992667 scopus 로고    scopus 로고
    • Capacitive micromachined ultrasonic transducers for forward looking intravascular imaging
    • J. Knight and F. L. Degertekin, "Capacitive micromachined ultrasonic transducers for forward looking intravascular imaging," in Proc. IEEE Ultrason. Symp., 2002, pp. 1052-1055.
    • (2002) Proc. IEEE Ultrason. Symp. , pp. 1052-1055
    • Knight, J.1    Degertekin, F.L.2
  • 9
    • 4143106118 scopus 로고    scopus 로고
    • Elevation beam profile control with bias polarity patterns applied to microfabricated ultrasound transducers
    • C. Daft, P. Wagner, S. Panda, and I. Ladabaum, "Elevation beam profile control with bias polarity patterns applied to microfabricated ultrasound transducers," in Proc. IEEE Ultrason. Symp., 2003, pp. 1578-1581.
    • (2003) Proc. IEEE Ultrason. Symp. , pp. 1578-1581
    • Daft, C.1    Wagner, P.2    Panda, S.3    Ladabaum, I.4
  • 10
    • 21644470582 scopus 로고    scopus 로고
    • Microfabricated ultrasonic transducers monolithically integrated with high voltage electronics
    • C. Daft, S. Calmes, D. de Graca, K. Patel, P. Wagner, and I. Ladabaum, "Microfabricated ultrasonic transducers monolithically integrated with high voltage electronics," in Proc. IEEE Ultrason. Symp., 2004, pp. 493-496.
    • (2004) Proc. IEEE Ultrason. Symp. , pp. 493-496
    • Daft, C.1    Calmes, S.2    De Graca, D.3    Patel, K.4    Wagner, P.5    Ladabaum, I.6
  • 11
    • 10444250226 scopus 로고    scopus 로고
    • Precompensated excitation waveforms to suppress harmonic generation in MEMS electrostatic transducers
    • S. Zhou, P. Reynolds, and J. Hossack, "Precompensated excitation waveforms to suppress harmonic generation in MEMS electrostatic transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, pp. 1564-1574, 2004.
    • (2004) IEEE Trans. Ultrason., Ferroelect., Freq. Contr. , vol.51 , pp. 1564-1574
    • Zhou, S.1    Reynolds, P.2    Hossack, J.3
  • 12
    • 21644444120 scopus 로고    scopus 로고
    • Modeling and design of CMUTs using higher order vibration modes for harmonic imaging
    • N. A. Hall, R. Guldiken, J. McLean, and F. L. Degertekin, "Modeling and design of CMUTs using higher order vibration modes for harmonic imaging," in Proc. IEEE Ultrason. Symp., 2004, pp. 260-263.
    • (2004) Proc. IEEE Ultrason. Symp. , pp. 260-263
    • Hall, N.A.1    Guldiken, R.2    McLean, J.3    Degertekin, F.L.4
  • 13
    • 21644482440 scopus 로고    scopus 로고
    • CMUTs with dual electrodes for improved transmit and receive operation
    • J. McLean, R. Guldiken, and F. L. Degertekin, "CMUTs with dual electrodes for improved transmit and receive operation," in Proc. IEEE Ultrason. Symp., 2004, pp. 501-504.
    • (2004) Proc. IEEE Ultrason. Symp. , pp. 501-504
    • McLean, J.1    Guldiken, R.2    Degertekin, F.L.3
  • 14
    • 4143113640 scopus 로고    scopus 로고
    • Real-time in-vivo imaging with capacitive micromachined ultrasound transducer (CMUT) linear arrays
    • D. M. Mills and L. S. Smith, "Real-time in-vivo imaging with capacitive micromachined ultrasound transducer (CMUT) linear arrays," in Proc. IEEE Ultrason. Symp., 2003, pp. 568-571.
    • (2003) Proc. IEEE Ultrason. Symp. , pp. 568-571
    • Mills, D.M.1    Smith, L.S.2
  • 17
    • 4143154086 scopus 로고    scopus 로고
    • Derivation of a ID CMUT model from FEM results for linear and nonlinear equivalent circuit simulation
    • A. Lohfink, P. C. Eccardt, W. Benecke, and H. Meixner, "Derivation of a ID CMUT model from FEM results for linear and nonlinear equivalent circuit simulation," in Proc. IEEE Ultrason. Symp., 2003, pp. 465-468.
    • (2003) Proc. IEEE Ultrason. Symp. , pp. 465-468
    • Lohfink, A.1    Eccardt, P.C.2    Benecke, W.3    Meixner, H.4
  • 18
    • 0033316194 scopus 로고    scopus 로고
    • Extending the travel range of analog-tuned electrostatic actuators
    • E. S. Hung and S. D. Senturia, "Extending the travel range of analog-tuned electrostatic actuators," IEEE J. Microelectromech. Syst., vol. 8, pp. 497-505, 1999.
    • (1999) IEEE J. Microelectromech. Syst. , vol.8 , pp. 497-505
    • Hung, E.S.1    Senturia, S.D.2
  • 21
    • 3042761104 scopus 로고    scopus 로고
    • Directional Scholte wave generation and detection using interdigital capacitive micromachined ultrasonic transducers
    • J. McLean and F. L. Degertekin, "Directional Scholte wave generation and detection using interdigital capacitive micromachined ultrasonic transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, pp. 756-764, 2004.
    • (2004) IEEE Trans. Ultrason., Ferroelect., Freq. Contr. , vol.51 , pp. 756-764
    • McLean, J.1    Degertekin, F.L.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.