Modeling and design of cmuts using higher order vibration modes

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 260-263

  Hall, Neal A ^a   Guldiken, Rasim O ^a   McLean, J ^a   Degertekin, F Levent ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; HARMONIC SIGNAL RECEPTION; VIBRATION FREQUENCY; VIBRATION MODES;

BANDWIDTH; CAPACITANCE; ELECTRODES; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; MATHEMATICAL MODELS; MICROMACHINING;

ULTRASONIC TRANSDUCERS;

EID: 21644444120     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. J. G. Knight and F. L. Degertekin, "Fabrication and Characterization of CMUTs for Forward Looking Intravascular Ultrasound Imaging", Proceedings of 2003 IEEE Ultrasonics Symposium, pp. 577-80, (2003)
2. J.G. Knight and F.L. Degertekin, "Capacitive Micromachined Ultrasonic Transducers for Forward Looking Intravascular Imaging Arrays", Proceedings of 2002 IEEE Ultrasonics Symposium, pp. 1079-1082 (2002)
3. G.G. Yaralioglu, A.S. Ergun, B. Bayram, E. Hæggström, and B.T. Khuri-Yakub, "Calculation and Measurement of Electromechanical Coupling Coefficient of Capacitive Micromachined Ultrasonic Transducers", IEEE Trans. on UFFC, Vol. 50, No. 4, pp.449-456 (2003)
4. J. McLean, R.O. Guldiken. and F.L. Degertekin, "CMUTs with Dual Electrode Structure for Improved Transmit and Receive Performance", Proc. IEEE Ultrasonics Symposium, U3-E-3 (2004)