Optimized membrane configuration improves cmut performance

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 505-508

  Huang, Yongli ^a   Hæggström, Edward O ^a   Zhuang, Xuefeng ^a   Ergun, Arif S ^a   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

CMUT; Optimization; Rectangular; Tent

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); RECTANGULAR; SQUARE MEMBRANES; TENT;

ACOUSTIC WAVES; BANDWIDTH; CAPACITORS; COMPUTER SIMULATION; ELECTRIC IMPEDANCE; ELECTRODES; ELECTROMAGNETIC WAVE TRANSMISSION; ELECTROSTATICS; FUNCTIONS; MICROMACHINING; OPTIMIZATION;

ULTRASONIC TRANSDUCERS;

EID: 21644469964     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. X. C. Jin, et al., "Fabrication and characterization of surface micromachined capacitive ultrasonic transducers," J. Micro-electromech. Syst., 8, p. 100-114, 1999.
2. P. Eccardt, et al., "Micromachined transducers in CMOS technology", proc. Ultrason. Symp., 1996, p. 959-962.
3. Y. Huang, et al., "Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology," J. Micro-electromech. Syst., 12, 2003, p. 128-137.
4. D. M. Mills, "Medical Imaging with Capacitive Micromachined Ultrasound Transducer (cMUT) Arrays," Proc. 2004 IEEE Ultrason. Symp., Montréal, August 24-27, 2004.
5. B. Bayram, et al. "A New Regime for Operating Capacitive Micromachined Ultrasonic Transducers," IEEE Trans. UFFC, 50(9), p. 1184-1190, 2003.
6. Y. Huang, et al., "Comparison of Collapsed Region and Pre-collapse Region Operation CMUTs Built with Wafer Bonding Technique," Proc. 2003 IEEE Ultrason. Symp., Hawaii, Oct. 6-9, 2003.