CMUTs with dual electrode structure for improved transmit and receive performance

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 501-504

  McLean, Jeff ^a   Guldiken, Rasim O ^a   Degertekin, F Levent ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); DUAL ELECTRODE STRUCTURES; ELECTRODE EXCITATION; NON-OPTIMIZED STRUCTURE;

CAPACITANCE; COMPUTER SIMULATION; DIELECTRIC MATERIALS; ELECTRODES; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON NITRIDE; SUBSTRATES;

ULTRASONIC TRANSDUCERS;

EID: 21644482440     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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7. N. Hall, R. Guldiken, et al., "Modeling and Design of CMUTs using Higher Order Vibration Modes for Harmonic Imaging", Proc. IEEE Ultrasonics Symposium, U3-C-4 (2004)