메뉴 건너뛰기




Volumn 39, Issue 7, 2006, Pages 1352-1362

Scanning ion deep level transient spectroscopy: II. Ion irradiated Au-Si Schottky junctions

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CAPACITANCE; DEFECTS; ION BOMBARDMENT; SCHOTTKY BARRIER DIODES; SENSITIVITY ANALYSIS;

EID: 33645048726     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/7/004     Document Type: Article
Times cited : (7)

References (50)
  • 5
    • 33645084031 scopus 로고    scopus 로고
    • Bardos R 2003 Ion beam induced charge: technique development and application to semiconductor charge particle detectors PhD Thesis School of Physics, University of Melbourne
    • (2003) PhD Thesis
    • Bardos, R.1
  • 7
    • 0001312002 scopus 로고    scopus 로고
    • Generation of vacancy-type point defects in single collision cascades during swift-ion bombardment of silicon
    • 0163-1829
    • Svensson B G, Jagadish C, Hallen A and Lalita J 1997 Generation of vacancy-type point defects in single collision cascades during swift-ion bombardment of silicon Phys. Rev. B: Condens. Matter 55 10498-507
    • (1997) Phys. Rev. B: Condens. Matter , vol.55 , Issue.16 , pp. 10498-10507
    • Svensson, B.G.1    Jagadish, C.2    Hallen, A.3    Lalita, J.4
  • 8
    • 3943091769 scopus 로고
    • Generation of point defects in crystalline silicon by MeV heavy ions: Dose rate and temperature dependence
    • 10.1103/PhysRevLett.71.1860 0031-9007
    • Svensson B G, Jagadish C and Williams J S 1993 Generation of point defects in crystalline silicon by MeV heavy ions: dose rate and temperature dependence Phys. Rev. Lett. 71 1860-3
    • (1993) Phys. Rev. Lett. , vol.71 , Issue.12 , pp. 1860-1863
    • Svensson, B.G.1    Jagadish, C.2    Williams, J.S.3
  • 9
    • 0036624507 scopus 로고    scopus 로고
    • Temperature dependence of heavy ion-induced current transients in Si epilayer devices
    • 10.1109/TNS.2002.1039672 0018-9499
    • Laird J S, Hirao T, Onoda S, Mori H and Itoh H 2002 Temperature dependence of heavy ion-induced current transients in Si epilayer devices IEEE Trans. Nucl. Sci. 49 1389-95
    • (2002) IEEE Trans. Nucl. Sci. , vol.49 , Issue.3 , pp. 1389-1395
    • Laird, J.S.1    Hirao, T.2    Onoda, S.3    Mori, H.4    Itoh, H.5
  • 11
    • 0027577741 scopus 로고
    • Point defects in n-type silicon implanted with low doses of MeV boron and silicon ions
    • 0268-1242 001
    • Jagadish C, Svensson B G and Hauser N 1993 Point defects in n-type silicon implanted with low doses of MeV boron and silicon ions Semicond. Sci. Technol. 8 481-7
    • (1993) Semicond. Sci. Technol. , vol.8 , Issue.4 , pp. 481-487
    • Jagadish, C.1    Svensson, B.G.2    Hauser, N.3
  • 13
    • 33645061534 scopus 로고
    • Point and extended defects in semiconductors
    • Kimerling L C 1989 Point and extended defects in semiconductors Structure and Properties of Point Defects in Semiconductors (NATO ASI Ser. B, Physics vol 202) ed G Beredek, A Cavallini and W Schroter (New York: Plenum) pp 1-14
    • (1989) Structure and Properties of Point Defects in Semiconductors , pp. 1-14
    • Kimerling, L.C.1
  • 14
    • 3843089388 scopus 로고
    • Defect symmetry from stress transient spectroscopy
    • 10.1103/PhysRevLett.51.1286 0031-9007
    • Meese J M, Farmer J W and Lamp C D 1983 Defect symmetry from stress transient spectroscopy Phys. Rev. Lett. 51 1286
    • (1983) Phys. Rev. Lett. , vol.51 , Issue.14 , pp. 1286
    • Meese, J.M.1    Farmer, J.W.2    Lamp, C.D.3
  • 18
    • 0001198915 scopus 로고
    • The influence of ion flux on defect production in MeV proton-irradiated silicon
    • 10.1063/1.349333 0021-8979
    • Hallen A, Fenyo D, Sundqvist B U R, Johnson R E and Svensson B G 1991 The influence of ion flux on defect production in MeV proton-irradiated silicon J. Appl. Phys. 70 3025-30
    • (1991) J. Appl. Phys. , vol.70 , Issue.6 , pp. 3025-3030
    • Hallen, A.1    Fenyo, D.2    Sundqvist, B.U.R.3    Johnson, R.E.4    Svensson, B.G.5
  • 24
    • 0001475770 scopus 로고
    • Generation of divacancies in silicon irradiated by 2 MeV electrons: Depth and dose dependence
    • Svensson B G and Willander M 1987 Generation of divacancies in silicon irradiated by 2 MeV electrons: depth and dose dependence J. Appl. Phys. 62
    • (1987) J. Appl. Phys. , vol.62
    • Svensson, B.G.1    Willander, M.2
  • 28
    • 0030149546 scopus 로고    scopus 로고
    • Defect evolution in irradiated silicon detector material
    • 10.1016/0168-9002(96)37410-X 0168-9002 A
    • MacEvoy B C and Hall G et al 1996 Defect evolution in irradiated silicon detector material Nucl. Instrum. Methods Phys. Res. A 374 12-26
    • (1996) Nucl. Instrum. Methods Phys. Res. , vol.374 , Issue.1 , pp. 12-26
    • MacEvoy, B.C.1    Al Et, H.G.2
  • 31
    • 33645073169 scopus 로고    scopus 로고
    • Laird J S 1999 Scanning ion deep level transient spectroscopy PhD Thesis School of Physics, University of Melbourne
    • (1999) PhD Thesis
    • Laird, J.S.1
  • 33
    • 0001499388 scopus 로고    scopus 로고
    • Lifetime in proton irradiated silicon
    • 10.1063/1.361816 0021-8979
    • Hallen A, Keskitalo N, Masszi F and Nagl V 1996 Lifetime in proton irradiated silicon J. Appl. Phys. 79 3906-14
    • (1996) J. Appl. Phys. , vol.79 , Issue.8 , pp. 3906-3914
    • Hallen, A.1    Keskitalo, N.2    Masszi, F.3    Nagl, V.4
  • 35
    • 0015636928 scopus 로고
    • Recombination in light-pulse excited silicon at medium-high carrier concentration levels
    • 10.1063/1.1662635 0021-8979
    • Tove P A and Andersson L G 1973 Recombination in light-pulse excited silicon at medium-high carrier concentration levels J. Appl. Phys. 44 2690-2
    • (1973) J. Appl. Phys. , vol.44 , Issue.6 , pp. 2690-2692
    • Tove, P.A.1    Andersson, L.G.2
  • 37
    • 0017453234 scopus 로고
    • Charge multiplication in silicon radiation detector under dense irradiation
    • 0018-9499
    • Belcarz E, Heijne E H M, Muller J C and Siffert P 1978 Charge multiplication in silicon radiation detector under dense irradiation IEEE Trans. Nucl. Sci. 25 378
    • (1978) IEEE Trans. Nucl. Sci. , vol.25 , pp. 378
    • Belcarz, E.1    Heijne, E.H.M.2    Muller, J.C.3    Siffert, P.4
  • 38
    • 0028709943 scopus 로고
    • Radiation-induced defect introduction rates in semiconductors
    • 10.1109/23.340523 0018-9499
    • Drevinsky P J, Frederickson A R and Elsaesser D W 1994 Radiation-induced defect introduction rates in semiconductors IEEE Trans. Nucl. Sci. 41 1913-23
    • (1994) IEEE Trans. Nucl. Sci. , vol.41 , Issue.6 , pp. 1913-1923
    • Drevinsky, P.J.1    Frederickson, A.R.2    Elsaesser, D.W.3
  • 39
    • 0006760104 scopus 로고
    • Forward bias-induced annealing of the e center in silicon
    • 10.1063/1.96663 0003-6951
    • Barnes C E and Samara G A 1986 Forward bias-induced annealing of the E center in silicon Appl. Phys. Lett. 48 934-6
    • (1986) Appl. Phys. Lett. , vol.48 , Issue.14 , pp. 934-936
    • Barnes, C.E.1    Samara, G.A.2
  • 43
    • 0016576617 scopus 로고
    • Electron and hole drift velocity measurements in silicon and their empirical relation to electric field and temperature
    • 0018-9383
    • Canali C, Majni G, Minder R and Ottaviani G 1975 Electron and hole drift velocity measurements in silicon and their empirical relation to electric field and temperature IEEE Trans. Electron Devices 22 1045-7
    • (1975) IEEE Trans. Electron Devices , vol.22 , pp. 1045-1047
    • Canali, C.1    Majni, G.2    Minder, R.3    Ottaviani, G.4
  • 44
    • 0001376863 scopus 로고
    • Thermally stimulated relaxation in solids
    • Lang D V 1979 Thermally stimulated relaxation in solids Topics in Appl. Phys. vol 37 ed P Braunlich (Berlin: Springer)
    • (1979) Topics in Appl. Phys. , vol.37
    • Lang, D.V.1
  • 46
    • 0036624507 scopus 로고    scopus 로고
    • Temperature dependence of heavy ion-induced current transients in si epilayer devices
    • 10.1109/TNS.2002.1039672 0018-9499
    • Laird J S, Hirao T, Onoda S, Mori H and Itoh H 2002 Temperature dependence of heavy ion-induced current transients in si epilayer devices IEEE Trans. Nucl. Sci. 49 1389-95
    • (2002) IEEE Trans. Nucl. Sci. , vol.49 , Issue.3 , pp. 1389-1395
    • Laird, J.S.1    Hirao, T.2    Onoda, S.3    Mori, H.4    Itoh, H.5
  • 47
    • 0026243244 scopus 로고
    • Theoretical prediction of the impact of Auger recombination on charge collection from an ion track
    • 10.1109/23.108360 0018-9499
    • Edmonds L D 1991 Theoretical prediction of the impact of Auger recombination on charge collection from an ion track IEEE Trans. Nucl. Sci. 38 999-1004
    • (1991) IEEE Trans. Nucl. Sci. , vol.38 , Issue.5 , pp. 999-1004
    • Edmonds, L.D.1
  • 48
    • 0000891274 scopus 로고    scopus 로고
    • Temperature and injection dependence of the Shockley-Read-Hall lifetime in electron-irradiated p-type silicon
    • 10.1063/1.367176 0021-8979
    • Keskitalo N, Jonsson P, Nordgren K, Bleichner H and Nordlander E 1998 Temperature and injection dependence of the Shockley-Read-Hall lifetime in electron-irradiated p-type silicon J. Appl. Phys. 83 4206-12
    • (1998) J. Appl. Phys. , vol.83 , Issue.8 , pp. 4206-4212
    • Keskitalo, N.1    Jonsson, P.2    Nordgren, K.3    Bleichner, H.4    Nordlander, E.5
  • 49
    • 0001548402 scopus 로고    scopus 로고
    • Temperature and injection dependence of the Shockley-Read-Hall lifetime in electron irradiated n-type silicon
    • 10.1063/1.362585 0021-8979
    • Bleichner H, Jonsson P, Keskitalo N and Nordlander E 1996 Temperature and injection dependence of the Shockley-Read-Hall lifetime in electron irradiated n-type silicon J. Appl. Phys. 79 9142-8
    • (1996) J. Appl. Phys. , vol.79 , Issue.12 , pp. 9142-9148
    • Bleichner, H.1    Jonsson, P.2    Keskitalo, N.3    Nordlander, E.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.