Fabrication of natural diamond microlenses by plasma etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 1, 2005, Pages 130-132

  Choi, H W ^a   Gu, E ^a   Liu, C ^a   Griffin, C ^a   Girkin, J M ^a   Watson, I M ^a   Dawson, M D ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; ATOMIC FORCE MICROSCOPY; CARRIER MOBILITY; MICROLENSES; OPTICAL DEVICES; PLASMA ETCHING; THERMAL CONDUCTIVITY;

CHEMICAL INERTNES; ELECTRICAL DEVICES;

DIAMONDS;

EID: 20444447839     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1843826     Document Type: Article

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