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Volumn 99, Issue 4, 2006, Pages

Influence of metal trapping on the shape of cavities induced by high energy He+ implantation

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACIAL ENERGY; ION IMPLANTATION; SILICON; TAPPING (FURNACE);

EID: 33644621970     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2173041     Document Type: Article
Times cited : (7)

References (22)
  • 17
    • 33644625300 scopus 로고    scopus 로고
    • http://www.ctcms.nist.gov/wulffman


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.