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Volumn 99, Issue 4, 2006, Pages
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Influence of metal trapping on the shape of cavities induced by high energy He+ implantation
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Author keywords
[No Author keywords available]
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Indexed keywords
INTERFACIAL ENERGY;
ION IMPLANTATION;
SILICON;
TAPPING (FURNACE);
METAL TRAPPING;
VICINAL SURFACES;
HELIUM;
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EID: 33644621970
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2173041 Document Type: Article |
Times cited : (7)
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References (22)
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