Microstructural difference between platinum and silver trapped in hydrogen induced cavities in silicon

Applied Physics Letters

Volumn 72, Issue 21, 1998, Pages 2713-2715

  Kinomura, A ^a   Williams, J S ^a   Wong Leung, J ^a   Petravic, M ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000129565     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121108     Document Type: Review

References (14)

1. M. I. Current, I. Yamada, N. W. Cheung, P. L. F. Hemment, and K. J. Reeson, in Handbook of Ion Implantation Technology, edited by J. F. Ziegler (North-Holland, Amsterdam, 1992), p. 363.
2. K. Graff, Metal Impurities in Silicon-Device Fabrication (Springer, Berlin, 1995).
3. J. Wong-Leung, C. E. Ascheron, M. Petravic, R. G. Elliman, and J. S. Williams, Appl. Phys. Lett. 66, 1231 (1995).
4. J. Wong-Leung, E. Nygren, and J. S. Williams, Appl. Phys. Lett. 67, 416 (1995).
5. B. Mohadjeri, J. S. Williams, and J. Wong-Leung, Appl. Phys. Lett. 66, 1889 (1995).
6. S. M. Myers, D. M. Follstaedt, and D. M. Bishop, Mater. Sci. Forum 143-147, 1635 (1994).
7. S. M. Myers and D. M. Follstaedt, J. Appl. Phys. 79, 1337 (1996).
8. S. M. Myers, G. A. Petersen, and C. H. Seager, J. Appl. Phys. 80, 3717 (1996).
9. A. Kinomura, J. S. Williams, J. Wong-Leung, and M. Petravic, Nucl. Instrum. Methods Phys. Res. B 127/128, 297 (1997).
10. -2 Si atoms covering these internal surfaces.
11. J. M. Poate, D. C. Jacobson, J. S. Williams, R. G. Elliman, and D. O. Boerma, Nucl. Instrum. Methods Phys. Res. B 19/20, 480 (1987).
12. H. Okamoto and L. E. Tanner, in Binary Alloy Phase Diagrams, edited by T. B. Massalski, H. Okamoto, P. R. Subramanian, and L. Kacprzak (ASM International, Materials Park, 1990), p. 3128.
13. B. Y. Tsaur, Z. L. Liau, and J. W. Mayer, Phys. Lett. A71, 270 (1979).
14. R. W. Olesinski and G. J. Abbaschian, in Binary Alloy Phase Diagrams, edited by T. B. Massalski, H. Okamoto, P. R. Subramanian, and L. Kacprzak (ASM International, Materials Park, 1990), p. 92.