Helium desorption from cavities induced by high energy 3He and 4He implantation in silicon

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 73, Issue 1, 2000, Pages 54-59

  Godey, S ^a   Ntsoenzok, E ^a   Sauvage, T ^a   Van Veen, A ^b   Labohm, F ^b   Beaufort, M F ^c   Barbot, J F ^c  

^a Centre National de la Recherche Scientifique   (France)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c LMP   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BUBBLE FORMATION; HELIUM; ION IMPLANTATION; MATHEMATICAL MODELS; MORPHOLOGY; TEMPERATURE PROGRAMMED DESORPTION; TRANSMISSION ELECTRON MICROSCOPY;

ISOCHRONAL ANNEALING; ISOTHERMAL ANNEALING; NANO-CAVITIES; NEUTRON DEPTH PROFILING; NON-RUTHERFORD ELASTIC BACKSCATTERING; NUCLEAR REACTION ANALYSIS; THERMAL DESORPTION SPECTROMETRY;

SILICON WAFERS;

EID: 0033897574     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00433-X     Document Type: Article

References (13)

1. Myers S.M., Bishop D.M., Follstaedt D.M., Stein H.J., Wampler W.R. Mat. Res. Soc. Symp. 283:1993;549.
2. Fichtner P.F.P., Kaschny J.R., Yankov R.A., Muecklich A., Kreissig U., Skorupa W. Appl. Phys. Lett. 70:1997;732.
3. Follstaedt D.M., Myers S.M., Petersen G.A., Medernach J.W. J. Electron. Mat. 25:1996;151.
4. Griffioen C.C., Evans J.H., de Jong P.C., Van Veen A. Nucl. Instr. Meth. B27:1987;417.
5. Krasny J.R., Fichtner P.F.P., Muecklich A., Kreissig U., Yankov R.A., Skorupa W. Nucl. Instr. Meth. B. 136-138:1998;583.
6. Roqueta F., Grob A., Grob J.J., Jerisan R., Stoquert J.P., Ventura L. Nucl. Instr. Meth. B147:1999;298.
7. P.F.P. Fichtner, J.R. Kaschny, A. Kling, H. Trinkaus, R.A. Yankov, A. Muecklich, U. Kreissig, W. Skorupa, F.C. Zawislak, L. Amaral, M.F. da Silva, J. C. Soares, E-MRS Spring 1998, Nucl. Instr. Meth. B136-138 (1998) 460.
8. van Wieringen A., Warmoltz N. Physica. 22:1956;849.
9. A. van Veen, in: S.E. Donnelly, J.H. Evans (Eds.), Fundamental Aspects of Inert Gases in Solids, Plenum Press, New York, 1991, pp. 41-57.
10. van Veen A., Reader A.H., Gravesteijn D.J., van Gorkum A.A. Thin Solid Films. 241:1993;206.
11. Mills R.L., Liebenberg D.H., Bronson J.H. Phys. Rev. B21:1980;5137.
12. Trinkaus H. Radiation Effects. 78:1983;189.
13. A. van Veen et al. (to be published).