Gettering of diffused Au and of Cu and Ni contamination in silicon by cavities induced by high energy He implantation

Physica Status Solidi (B) Basic Research

Volumn 222, Issue 1, 2000, Pages 319-326

  El Bouayadi, R ^a   Regula, G ^a   Pichaud, B ^a   Lancin, M ^a   Dubois, C ^b   Ntsoenzok, E ^c  

^a AIX MARSEILLE UNIVERSITY   (France)

^b UNIVERSITÉ DE LYON   (France)

^c Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0034336223     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3951(200011)222:1<319::AID-PSSB319>3.0.CO;2-Q     Document Type: Article

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