Three dimensional EUV simulations - A new mask near field and imaging simulation system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5992, Issue 2, 2005, Pages

  Evanschitzky, Peter ^a   Erdmann, Andreas ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

Author keywords

3D EUV simulation; Jones pupil; Waveguide

Indexed keywords

COMPUTER SIMULATION; ELECTROMAGNETIC FIELDS; IMAGING SYSTEMS; NATURAL FREQUENCIES; PHOTOLITHOGRAPHY; ULTRAVIOLET RADIATION;

3D EUV SIMULATION; COMPUTATION TIME; JONES PUPIL; MASK NEAR FIELDS;

MASKS;

EID: 33644597120     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.632071     Document Type: Conference Paper

References (12)

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