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Volumn 16, Issue 3, 2006, Pages 512-525

A semi-analytical tool based on geometric nonlinearities for microresonator design

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BOUNDARY CONDITIONS; FINITE ELEMENT METHOD; PRODUCT DESIGN; RESONATORS; SENSORS; TRANSFER FUNCTIONS;

EID: 33344469114     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/16/3/006     Document Type: Article
Times cited : (20)

References (27)
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  • 3
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    • Currano L 2002 Experimental and finite element analysis of piezoelectrically driven MEMS actuators MS Thesis Department of Mechanical Engineering, University of Maryland, College Park
    • (2002) MS Thesis
    • Currano, L.1
  • 6
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    • Buckling and free oscillations of composite microresonators
    • Li H and Balachandran B 2005 Buckling and free oscillations of composite microresonators J. Microelectromech. Syst. 15 1-10
    • (2005) J. Microelectromech. Syst. , vol.15 , pp. 1-10
    • Li, H.1    Balachandran, B.2
  • 7
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    • High-fidelity modeling of MEMS resonators-part I: Anchor loss mechanics through substrate
    • Park Y-H and Park K C 2004 High-fidelity modeling of MEMS resonators-part I: anchor loss mechanics through substrate J. Microelectromech. Syst. 13 238-47
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    • Park, Y.-H.1    Park, K.C.2
  • 8
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    • High-fidelity modeling of MEMS resonators-part II: Coupled beam-substrate dynamics and validation
    • Park Y-H and Park K C 2004 High-fidelity modeling of MEMS resonators-part II: coupled beam-substrate dynamics and validation J. Microelectromech. Syst. 13 248-57
    • (2004) J. Microelectromech. Syst. , vol.13 , Issue.2 , pp. 248-257
    • Park, Y.-H.1    Park, K.C.2
  • 10
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    • A finite element-electric circuit coupled simulation method for piezoelectric transducer
    • Wang J S and Ostergaard D F 1999 A finite element-electric circuit coupled simulation method for piezoelectric transducer IEEE Ultrasonics Symposium
    • (1999) IEEE Ultrasonics Symposium
    • Wang, J.S.1    Ostergaard, D.F.2
  • 11
    • 0036488960 scopus 로고    scopus 로고
    • Theoretical and numerical predictions of the electromechanical behavior of spiral-shaped lead zirconate titanate (PZT) actuators
    • Chen B, Cheeseman B A, Safari A, Danforth S C and Chou T-W 2002 Theoretical and numerical predictions of the electromechanical behavior of spiral-shaped lead zirconate titanate (PZT) actuators IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49 319-26
    • (2002) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.49 , Issue.3 , pp. 319-326
    • Chen, B.1    Cheeseman, B.A.2    Safari, A.3    Danforth, S.C.4    Chou, T.-W.5
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    • A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structure
    • Chen S, Baughn T V, Yao Z J and Goldsmith C L 2002 A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structure J. Microelectromech. Syst. 11 309-16
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  • 15
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    • An experimental/computational approach to identify moduli and residual stress in MEMS radio-frequency switches
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.