Topics in finite-element modeling of piezoelectric MEMS

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 269-272

  Von Preissig, F J ^a   Kim, E S ^b  

^a University of Hawaii at Manoa   (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

Error; FEM; Film; MEMS; Piezoelectric

Indexed keywords

ELECTRICAL MODELING; ELEMENT SHAPE ERROR; MECHANICAL FIELDS; VIBRATION CONTROL DEVICE;

ACTUATORS; COMPUTER AIDED DESIGN; DATA REDUCTION; ELECTRODES; ERROR ANALYSIS; FINITE ELEMENT METHOD; PIEZOELECTRIC DEVICES; SENSORS; SHEAR STRESS; THIN FILMS; TRANSDUCERS; VIBRATION CONTROL;

MICROELECTROMECHANICAL DEVICES;

EID: 6344282870     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. Y. Kagawa, and T. Yamabuchi, IEEE Trans. Sonics Ultrasonics SU-26, 81, 1979.