Measuring wavefront tilt using shearing interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5965, Issue , 2005, Pages

  Schreiber, Horst ^a  

^a Corning Tropel Corp ^*  (United States)

Author keywords

Interferometer; Lateral shearing; Radial shearing; Rotational shearing; Tilt measurement

Indexed keywords

LATERAL SHEARING; RADIAL SHEARING; ROTATIONAL SHEARING; TILT MEASUREMENT;

COHERENT LIGHT; EXCIMER LASERS; INTERFEROMETERS; OPTICAL PHASE CONJUGATION; SHEARING; ULTRAVIOLET RADIATION;

INTERFEROMETRY;

EID: 33244460296     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.625247     Document Type: Conference Paper

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