A high precision 2-D angle measurement interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4778, Issue , 2002, Pages 277-287

  Ge, Zongtao ^a   Takeda, Mitsuo ^b  

^a Fuji Photo Optical Co Ltd   (Japan)

^b UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

2 D angle measurement; Fourier transform method; Fringe analysis; Interferometry; Least square fitting; Mirau objective; Phase shift method; Window function

Indexed keywords

FOURIER TRANSFORMS; INTERFEROMETERS; LEAST SQUARES APPROXIMATIONS; PHASE SHIFT;

FRINGE ANALYSIS METHOD;

ANGLE MEASUREMENT;

EID: 0036421195     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.473545     Document Type: Article

References (20)

1. J. Rohlin, "An interferometer for precision angle measurement," Appl. Opt. 2, 762-763 (1963).
2. D. Malacara and Garries, "Interferometric measurement of angles," Appl. Opt. 9, 1630-1633 (1970).
3. G.D. Chapman, "Interferometric angular measurement," Appl. Opt. 13, 1646-1651 (1974).
4. Pan Shi and E. Stujns, "New optical methods for measuring small-angle rotations," Appl. Opt. 27, 4342-4344(1988).
5. P.R. Yoder, Jr., E.R. Schlesinger and J.L. Chickvary, "Active annular-beam laser autocollimator system," Appl. Opt. 14, 1890-1895 (1975).
6. F.J. Shuda, "High-precision, wide-range, dual-axis, angle monitoring system," Rev. Sci. Instrum. 54, 1648-1652 (1983).
7. A.E. Ennos and M.S. Virdee, "High accuracy profile measurement of quasi-conical mirror surface by laser autocollimator," Prec. Eng. 4, 5-8 (1982).
8. P.S. Huang, S. Kiyono and O. Kamada, "Angle measurement based on the internal reflection effect," Appl. Opt. 31, 6047-6055 (1992).
9. P.S. Huang and J. Ni, "Angle measurement based on the internal reflection effect and the use of right-angle prisms," Appl. Opt. 34, 4976-4981 (1995).
10. P.S. Huang and J. Ni, "Angle measurement based on the internal reflection effect and the use of elongated critical-angle prisms," Appl. opt. 35, 2239-2241 (1996).
11. P.S. Huang and Yuxin Li, "Small-angle measurement by use of a single prism," Appl. Opt. 37, 6636-6642 (1998).
12. The electronic autocollimator ELCOMAT HR technical data, Moeller-Wedel Optical GmbH, Rosengarten 10-22880 Wedel, Germany.
13. M. Takeda, H. Ina and S. Kobayashi, "Fourier transforms method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, 156-160 (1982).
14. C. Roddier and F. Roddier, "Interferogram analysis using Fourier transform techniques," Appl. Opt. 26, 1668-1673 (1987).
15. D.J. Bone, H.-A. Bachor, and R.J. Sandeman, "Fringe pattern analysis using 2-D Fourier transform," Appl. Opt. 25, 1653-1660 (1986).
16. J.H. Brunining, D.R. Herriott, J.E. Gallager, D.P. Rosenfel, A.D. White and D.J. Brangaccio, "Digital wave front measuring interferometer for testing optical surfaces and lenses," Appl. Opt. 13, 2693-2703 (1974).
17. P. Hariharan, B.F. Oreb, and T. Eiju, "Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm," Appl. Opt. 26, 2504-2505 (1987).
18. P.D. Groot, "Phase-shift calibration errors in interferometers with spherical Fizeau cavities," Appl. Opt. 34, 2856-2863 (1995).
19. Z.T. Ge and M. Takeda: High precision 2-D angle measurement using fringe analysis techniques: Simulations, SPIE's 46th Annual Meeting, San Diego, USA, Jul.30-Aug. 3 (2001) Proc. of SPIE, Vol. 4451, pp.448-457.
20. S. Kiyono and Z. Ge: Sub-nanometric calibration of a differential interferometer, Precision Engineering, Journal of ASPE, Vol. 19, No. 2/3, (1996) pp. 187-197.