Technique of recording and judging the sign of tilt in one interferogram

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2576, Issue , 1995, Pages 326-334

  Tenjimbayashi, Koji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LATERAL SHEARING INTERFEROMETERS; MEASUREMENT FOR FABRICATION; SIGN OF TILT; TWYMAN GREEN INTERFEROMETER;

FABRICATION; MEASUREMENT ERRORS; MOIRE FRINGES; OPTICAL DEVICES; OPTICAL VARIABLES MEASUREMENT;

INTERFEROMETERS;

EID: 0029181226     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)