Applications of a grating shearing interferometer at 157 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4346, Issue 2, 2001, Pages 1095-1106

  Schreiber, Horst ^a   Dewa, Paul ^a   Dunn, Michael ^a   Hordin, Richard ^a   Mack, Stephen ^a   Start, Bryan ^a   Tompkins, Paul ^a  

^a Tropel Corp ^*  (United States)

Author keywords

157; Interferometry; Shearing; Spatial coherence; Wavefront

Indexed keywords

ABERRATIONS; DIFFRACTION GRATINGS; FUSED SILICA; INFRARED RADIATION; INTERFEROMETRY; LENSES; OPTICAL TESTING; REACTIVE ION ETCHING;

SPATIAL COHERENCE;

INTERFEROMETERS;

EID: 0035758734     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.435643     Document Type: Conference Paper

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