Lateral shearing interferometer based on two Ronchi phase gratings in series

Applied Optics

Volumn 36, Issue 22, 1997, Pages 5321-5324

  Schreiber, H ^a   Schwider, J ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Lateral shearing interferometry; Near IR; Phase shifting interferometry; Testing of silicon microlenses

Indexed keywords

EID: 0000134675     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.005321     Document Type: Article

References (9)

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3. M. C. Hutley, Diffraction Gratings (Academic, London, 1982).
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5. D. Malacara, ed., Optical Shop Testing (Wiley, New York, 1978).
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9. V. Ronchi, “Forty years of history of a grating interferometer, ” Appl. Opt. 3, 437-451 (1964).