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Volumn 5531, Issue , 2004, Pages 299-303

Absolute measurement of tilts via Fourier analysis of interferograms

Author keywords

[No Author keywords available]

Indexed keywords

FRINGE ANALYSIS; INTERACTIVE DATA LANGUAGE (IDL); PHASE SHIFT INTERFEROMETRY (PSI); VECTOR METROLOGY;

EID: 15744404162     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559810     Document Type: Conference Paper
Times cited : (3)

References (10)
  • 1
    • 13444261210 scopus 로고    scopus 로고
    • Theoferometer for high accuracy optical alignment and metrology
    • Aug
    • R.Toland, D. Leviton and S. Koterba, "Theoferometer for High Accuracy Optical Alignment and Metrology," SPIE Proceedings, Aug 2004
    • (2004) SPIE Proceedings
    • Toland, R.1    Leviton, D.2    Koterba, S.3
  • 2
    • 0019927495 scopus 로고
    • Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
    • M. Takeda, H. Ina, and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, pp. 156-160, 1981
    • (1981) J. Opt. Soc. Am. , vol.72 , pp. 156-160
    • Takeda, M.1    Ina, H.2    Kobayashi, S.3
  • 3
    • 0004161838 scopus 로고    scopus 로고
    • Chap. 12&13, Cambridge University Press, New York
    • Press et. al., Numerical Recipes in Fortran, Chap. 12&13, Cambridge University Press, New York, 1996
    • (1996) Numerical Recipes in Fortran
    • Press1
  • 5
    • 0000682663 scopus 로고
    • Fringe-pattern analysis using a 2-D Fourier transform
    • D. Bone, H.A. Bachor, and R. J. Sandeman, "Fringe-pattern analysis using a 2-D Fourier transform," Applied Optics 25, pp. 1653-1660, 1986
    • (1986) Applied Optics , vol.25 , pp. 1653-1660
    • Bone, D.1    Bachor, H.A.2    Sandeman, R.J.3
  • 6
    • 84975587053 scopus 로고
    • Interferogram analysis using Fourier transform techniques
    • C. Roddier and F. Roddier, "Interferogram analysis using Fourier transform techniques," Applied Optics 26, pp. 1668-1673, 1987
    • (1987) Applied Optics , vol.26 , pp. 1668-1673
    • Roddier, C.1    Roddier, F.2
  • 7
    • 0028512714 scopus 로고
    • Use of the fast Fourier transform method for analyzing linear and equispaced Fizeau fringes
    • G. Lai and T. Yatagai, "Use of the fast Fourier transform method for analyzing linear and equispaced Fizeau fringes," Applied Optics 23, pp. 5935-5940, 1994
    • (1994) Applied Optics , vol.23 , pp. 5935-5940
    • Lai, G.1    Yatagai, T.2
  • 8
    • 0020940715 scopus 로고
    • Two-dimensional fringe-pattern analysis
    • W. Macy, Jr., "Two-dimensional fringe-pattern analysis," Applied Optics 22, pp. 3898-3901, 1983
    • (1983) Applied Optics , vol.22 , pp. 3898-3901
    • Macy Jr., W.1
  • 9
    • 0004139061 scopus 로고    scopus 로고
    • Cambridge University Press
    • th ed., pp. 320-338, Cambridge University Press, 2002
    • (2002) th Ed. , pp. 320-338
    • Born1    Wolf2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.