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Volumn 5531, Issue , 2004, Pages 299-303
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Absolute measurement of tilts via Fourier analysis of interferograms
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Author keywords
[No Author keywords available]
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Indexed keywords
FRINGE ANALYSIS;
INTERACTIVE DATA LANGUAGE (IDL);
PHASE SHIFT INTERFEROMETRY (PSI);
VECTOR METROLOGY;
ALGORITHMS;
CAMERAS;
CHARGE COUPLED DEVICES;
COMPUTER SOFTWARE;
FOURIER TRANSFORMS;
INTERFEROMETERS;
INTERFEROMETRY;
INTERPOLATION;
OPTICAL SYSTEMS;
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EID: 15744404162
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.559810 Document Type: Conference Paper |
Times cited : (3)
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References (10)
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