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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5776, Issue , 2005, Pages 270-277

Diffractive lateral shearing interferometer for phase shift mask measurement using an excimer laser source

(3) Schwider, J a Futterer G a Lindlein, N a

a UNIVERSITY OF ERLANGEN NUREMBERG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE LATERAL SHEARING INTERFEROMETERS; FRINGE PATTERNS; PHASE SHIFT MASKS (PSM); WAVELENGTH;

DIFFRACTION GRATINGS; EXCIMER LASERS; INTERFEROMETRY; LIGHT SOURCES; MASKS; OPTICAL VARIABLES MEASUREMENT; PHASE SHIFT; PHOTOLITHOGRAPHY; PROJECTION SYSTEMS; ULTRAVIOLET RADIATION;

INTERFEROMETERS;

EID: 26444445626 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.611690 Document Type: Conference Paper

Times cited : (2)

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