메뉴 건너뛰기




Volumn 42, Issue 34, 2003, Pages 6859-6868

High-resolution two-dimensional angle measurement technique based on fringe analysis

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; COMPUTER SIMULATION; FAST FOURIER TRANSFORMS; INTERFEROMETERS; LENSES; MIRRORS; PHASE SHIFT; PROFILOMETRY;

EID: 0344686365     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.006859     Document Type: Article
Times cited : (60)

References (23)
  • 1
    • 84975560634 scopus 로고
    • An interferometer for precision angle measurement
    • J. Rohlin, “An interferometer for precision angle measurement,” Appl. Opt. 2, 762-763 (1963).
    • (1963) Appl. Opt. , vol.2 , pp. 762-763
    • Rohlin, J.1
  • 2
    • 0014824199 scopus 로고
    • Interferometric measurement of angles
    • D. Malacara and Garries, G., “Interferometric measurement of angles,” Appl. Opt. 9, 1630-1633 (1970).
    • (1970) Appl. Opt. , vol.9 , pp. 1630-1633
    • Malacara, D.1    Garries, G.2
  • 3
    • 0016082280 scopus 로고
    • Interferometric angular measurement
    • G. D. Chapman, “Interferometric angular measurement,” Appl. Opt. 13, 1646-1651 (1974).
    • (1974) Appl. Opt. , vol.13 , pp. 1646-1651
    • Chapman, G.D.1
  • 4
    • 84975624001 scopus 로고
    • New optical methods for measuring small-angle rotations
    • P. Shi and E. Stujns, “New optical methods for measuring small-angle rotations,” Appl. Opt. 27, 4342-4344 (1988).
    • (1988) Appl. Opt. , vol.27 , pp. 4342-4344
    • Shi, P.1    Stujns, E.2
  • 5
    • 84975563681 scopus 로고
    • Active annular-beam laser autocollimator system
    • P. R. Yoder, Jr., E. R. Schlesinger, and J. L. Chickvary, “Active annular-beam laser autocollimator system,” Appl. Opt. 14, 1890-1895 (1975).
    • (1975) Appl. Opt , vol.14 , pp. 1890-1895
    • Yoder, P.R.1    Schlesinger, E.R.2    Chickvary, J.L.3
  • 6
    • 0020934342 scopus 로고
    • High-precision, wide-range, dual-axis, angle monitoring system
    • F. J. Shuda, “High-precision, wide-range, dual-axis, angle monitoring system,” Rev. Sci. Instrum. 54, 1648-1652 (1983).
    • (1983) Rev. Sci. Instrum. , vol.54 , pp. 1648-1652
    • Shuda, F.J.1
  • 7
    • 0019899439 scopus 로고
    • High accuracy profile measurement of quasi-conical mirror surface by laser autocollimation
    • A. E. Ennos and M. S. Virdee, “High accuracy profile measurement of quasi-conical mirror surface by laser autocollimation,” Prec. Eng. 4, 5-8 (1982).
    • (1982) Prec. Eng. , vol.4 , pp. 5-8
    • Ennos, A.E.1    Virdee, M.S.2
  • 8
    • 0347014637 scopus 로고
    • Angle measurement based on the internal reflection effect
    • P. S. Huang, S. Kiyono, and O. Kamada, “Angle measurement based on the internal reflection effect,” Appl. Opt. 31, 6047-6055 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 6047-6055
    • Huang, P.S.1    Kiyono, S.2    Kamada, O.3
  • 9
    • 19844378845 scopus 로고
    • Angle measurement based on the internal reflection effect and the use of right-angle prisms
    • P. S. Huang and J. Ni, “Angle measurement based on the internal reflection effect and the use of right-angle prisms,” Appl. Opt. 34, 4976-4981 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 4976-4981
    • Huang, P.S.1    Ni, J.2
  • 10
    • 0030151056 scopus 로고    scopus 로고
    • Angle measurement based on the internal reflection effect and the use of elongated critical-angle prisms
    • P. S. Huang and J. Ni, “Angle measurement based on the internal reflection effect and the use of elongated critical-angle prisms,” Appl. Opt. 35, 2239-2241 (1996).
    • (1996) Appl. Opt. , vol.35 , pp. 2239-2241
    • Huang, P.S.1    Ni, J.2
  • 11
    • 0001175603 scopus 로고    scopus 로고
    • Small-angle measurement by use of a single prism
    • P. S. Huang and Y. Li, “Small-angle measurement by use of a single prism,” Appl. Opt. 37, 6636-6642 (1998).
    • (1998) Appl. Opt. , vol.37 , pp. 6636-6642
    • Huang, P.S.1    Li, Y.2
  • 12
    • 0019927495 scopus 로고
    • Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
    • M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156-160 (1982).
    • (1982) J. Opt. Soc. Am. , vol.72 , pp. 156-160
    • Takeda, M.1    Ina, H.2    Kobayashi, S.3
  • 13
    • 84975587053 scopus 로고
    • Interferogram analysis using Fourier transform techniques
    • C. Roddier and F. Roddier, “Interferogram analysis using Fourier transform techniques,” Appl. Opt. 26, 1668-1673 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 1668-1673
    • Roddier, C.1    Roddier, F.2
  • 14
    • 0000682663 scopus 로고
    • Fringe pattern analysis using 2-D Fourier transform
    • D. J. Bone, H.-A. Bachor, and R. J. Sandeman, “Fringe pattern analysis using 2-D Fourier transform,” Appl. Opt. 25, 1653-1660 (1986).
    • (1986) Appl. Opt. , vol.25 , pp. 1653-1660
    • Bone, D.J.1    Bachor, H.-A.2    Sandeman, R.J.3
  • 16
    • 84928815585 scopus 로고
    • Digital phase-shifting interferometry: A simple error-compensating phase calculation algorithm
    • P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504-2505 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 2504-2505
    • Hariharan, P.1    Oreb, B.F.2    Eiju, T.3
  • 17
    • 84975648049 scopus 로고
    • Phase-shift calibration errors in interferometers with spherical Fizeau cavities
    • P. D. Groot, “Phase-shift calibration errors in interferometers with spherical Fizeau cavities,” Appl. Opt. 34, 2856 -2863 (1995).
    • (1995) Appl. Opt. , vol.34
    • Groot, P.D.1
  • 18
    • 0014806264 scopus 로고
    • Moire topography
    • H. Takasaki, “Moire topography,” Appl. Opt. 9, 1467-1472 (1970).
    • (1970) Appl. Opt. , vol.9 , pp. 1467-1472
    • Takasaki, H.1
  • 19
    • 0017521878 scopus 로고
    • Scanning moire method and automatic measurement of 3D shape
    • M. Idesawa, T. Yatagai, and T. Soma, “Scanning moire method and automatic measurement of 3D shape,” Appl. Opt. 16, 2152-2162 (1977).
    • (1977) Appl. Opt. , vol.16 , pp. 2152-2162
    • Idesawa, M.1    Yatagai, T.2    Soma, T.3
  • 20
    • 0035761778 scopus 로고    scopus 로고
    • High precision 2-D angle measurement using fringe analysis techniques
    • H. P. Stahl, ed., Proc. SPIE Vol
    • Z. T. Ge and M. Takeda, “High precision 2-D angle measurement using fringe analysis techniques,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE Vol. 4451, 448-457 (2001).
    • (2001) Optical Manufacturing and Testing IV , vol.4451 , pp. 448-457
    • Ge, Z.T.1    Takeda, M.2
  • 21
    • 0036421195 scopus 로고    scopus 로고
    • A high precision 2-D angle measurement interferometer
    • W. Osten, ed., Proc. SPIE
    • Z. T. Ge and M. Takeda, “A high precision 2-D angle measurement interferometer,” in Interferometry XI: Applications, W. Osten, ed., Proc. SPIE 4778, 277-287 (2002).
    • (2002) Interferometry XI: Applications , vol.4778 , pp. 277-287
    • Ge, Z.T.1    Takeda, M.2
  • 22
    • 0017851927 scopus 로고
    • On the use of windows for harmonic analysis with the discrete Fourier transform
    • F. J. Harris, “On the use of windows for harmonic analysis with the discrete Fourier transform,” Proc. IEEE 66, 51-83 (1978).
    • (1978) Proc. IEEE , vol.66 , pp. 51-83
    • Harris, F.J.1
  • 23
    • 0030260246 scopus 로고    scopus 로고
    • Sub-nanometric calibration of a differential interferometer
    • S. Kiyono and Z. T. Ge, “Sub-nanometric calibration of a differential interferometer,” Precis. Eng. 19, 187-197 (1996).
    • (1996) Precis. Eng. , vol.19 , pp. 187-197
    • Kiyono, S.1    Ge, Z.T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.