Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si

Applied Physics Letters

Volumn 81, Issue 22, 2002, Pages 4215-4217

  Nagarajan, V ^a   Stanishevsky, A ^a   Chen, L ^a   Zhao, T ^a   Liu, B T ^a   Melngailis, J ^a   Roytburd, A L ^a   Ramesh, R ^a   Finder, J ^b   Yu, Z ^b   Droopad, R ^b   Eisenbeiser, K ^b  

^a UNIVERSITY OF MARYLAND   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; EPITAXIAL GROWTH; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; MAGNETIC FIELD EFFECTS; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; PHASE DIAGRAMS; THERMODYNAMICS; THIN FILMS;

SCANNING FORCE MICROSCOPY;

PIEZOELECTRICITY;

EID: 0037175937     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1516857     Document Type: Article

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