Piezoelectric properties and acoustic wave detection of Pb(Zr0.52Ti0.48)O3 thin films for microelectromechanical systems sensor

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 7 A, 1999, Pages

  Cho, Chae Ryong ^a   Francis, Lorraine F ^a   Jang, Min Su ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC EMISSIONS; DEPOSITION; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; POLARIZATION; SENSORS; SOL-GELS; THIN FILMS;

ACOUSTIC WAVE DETECTION;

DIELECTRIC FILMS;

EID: 0032594953     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l751     Document Type: Article

References (13)