Metastable CF and CF2 molecules in CF4 inductively-coupled plasmas

Plasma Sources Science and Technology

Volumn 15, Issue 1, 2006, Pages 112-116

  Booth, Jean Paul ^a   Corr, Cormac ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON INORGANIC COMPOUNDS; ELECTRONS; GROUND STATE; LIGHT EMISSION; MOLECULES; QUENCHING;

EXCITATION TRANSFER; GAS-PHASE PROCESSES; OPTICAL EMISSION SIGNALS; QUENCHING COEFFICIENTS;

INDUCTIVELY COUPLED PLASMA;

EID: 32844461502     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/15/1/017     Document Type: Article

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