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Solid State Communications

Volumn 132, Issue 5, 2004, Pages 347-350

Surface partition of ion energy during the growth of TiNx thin films

(2) Ma, Z Q a Zhang, Q a

a SHANGHAI UNIVERSITY (China)

Author keywords

A. Thin films; A. Titanium nitride; B. Epitaxy; C. Energy partition

Indexed keywords

DEPOSITION; EPITAXIAL GROWTH; FILM GROWTH; IONIZATION; MAGNETRON SPUTTERING; MICROSTRUCTURE; OPTIMIZATION; THIN FILMS;

ENERGY PARTITION; ION ENERGY; SUBSURFACE MICROSTRUCTURE;

TITANIUM NITRIDE;

EID: 4544314575 PISSN: 00381098 EISSN: None Source Type: Journal
DOI: 10.1016/j.ssc.2004.07.059 Document Type: Article

Times cited : (1)

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