Wear durability and adhesion evaluation methods for ultrathin overcoat films by atomic force microscopy

IEICE Transactions on Electronics

Volumn E81-C, Issue 3, 1998, Pages 337-341

  Umemura, Shigeru ^a   Hirono, Shigeru ^a   Andoh, Yasuko ^a   Kaneko, Reizo ^b  

^a NTT CORPORATION   (Japan)

^b WAKAYAMA UNIVERSITY   (Japan)

Author keywords

Adhesion; AFM; Microtribology; Thin film; Wear

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; DURABILITY; TRIBOLOGY; WEAR OF MATERIALS;

MICROTRIBOLOGY; SCANNING SCRATCH CYCLES; ULTRATHIN OVERCOAT FILMS;

ULTRATHIN FILMS;

EID: 0032026091     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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