Accurate force measurements for miniature mechanical systems: A review of progress

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3225, Issue , 1997, Pages 2-11

  Howard, Lowell P ^a   Fu, Joe ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Afm; Force measurement; Mems; Nanonewton

Indexed keywords

CALIBRATION; MEMS; MICROMACHINING;

ELECTROMAGNETIC TECHNIQUES; FORCE CALIBRATION; MECHANICAL SYSTEMS; MEMS FORCES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NANONEWTON; VIRTUAL POWER; WATT BALANCE;

FORCE MEASUREMENT;

EID: 24644449465     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.284543     Document Type: Conference Paper

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