Improved method for measuring photoacid generator kinetics in polymer thin films using normalized interdigitated electrode capacitance data

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 1163-1173

  Berger, Cody M ^a   Henderson, Clifford L ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; CAPACITANCE; PARAMETER ESTIMATION; PHOTORESISTS; RATE CONSTANTS; SENSORS; SPIN COATING; THIN FILMS;

CASTING SOLVENTS; ELECTRODE CAPACITANCE; PHOTOACID GENERATOR KINETICS; RESIST MATRIX POLYMERS;

PLASTIC FILMS;

EID: 3242707810     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1755219     Document Type: Article

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