Simple method for measuring acid generation quantum efficiency at 193 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3678, Issue II, 1999, Pages 857-866

  Szmanda, Charles R ^a   Kavanagh, Robert ^a   Bohland, John ^a   Cameron, James ^a   Trefonas, Peter ^a   Blacksmith, Robert ^a  

^a SHIPLEY COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT ABSORPTION; QUANTUM EFFICIENCY;

PHOTOGENERATED ACID;

PHOTORESISTS;

EID: 0032662522     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350274     Document Type: Conference Paper

References (24)