Using Interdigitated Electrodes for Measuring Photoacid Generator Kinetics in Chemically Amplified Resists

Journal of the Electrochemical Society

Volumn 151, Issue 2, 2004, Pages

  Berger, Cody M ^a   Byers, Jeffrey D ^b   Henderson, Clifford L ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b KLA Tencor Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDITY; CAPACITANCE; ELECTRODES; ETHERS; PHOTORESISTS; REACTION KINETICS; STYRENE; ULTRAVIOLET RADIATION;

CHEMICALLY AMPLIFIED RESISTS; INTERDIGITATED ELECTRODES;

THIN FILMS;

EID: 1242287578     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1638387     Document Type: Article

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