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Volumn 260, Issue 3, 2006, Pages 274-286

Engineering surface and development of a new DNA micro array chip

Author keywords

Chemical absorption; ESEM; Functional surface; Glass; Micro nano fabrication; Nano forming; Surface energy

Indexed keywords

CHIP SCALE PACKAGES; CONTROLLABILITY; EVALUATION; GLASS; INTERFACIAL ENERGY; NANOTECHNOLOGY;

EID: 32244445865     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2005.04.028     Document Type: Article
Times cited : (58)

References (41)
  • 1
    • 0025414837 scopus 로고
    • Ductile regime machining of germanium and silicon
    • P.N. Blake Ductile regime machining of germanium and silicon J. Am. Ceram. Soc. 73 4 1990 949 957
    • (1990) J. Am. Ceram. Soc. , vol.73 , Issue.4 , pp. 949-957
    • Blake, P.N.1
  • 2
    • 8344235211 scopus 로고    scopus 로고
    • Scratching test of hard-brittle materials under high hydrostatic pressure
    • M. Yoshino, T. Aoki, and T. Shirakashi Scratching test of hard-brittle materials under high hydrostatic pressure ASME J. Manuf. Sci. Eng. 123 2 2001 231 239
    • (2001) ASME J. Manuf. Sci. Eng. , vol.123 , Issue.2 , pp. 231-239
    • Yoshino, M.1    Aoki, T.2    Shirakashi, T.3
  • 3
    • 0035157059 scopus 로고    scopus 로고
    • On the ductile machining of silicon for micro electro-mechanical (MEMS), opto-electronic and optical applications
    • J. Yan, M. Yoshino, T. Kuriagawa, T. Shirakashi, K. Syoji, and R. Komanduri On the ductile machining of silicon for micro electro-mechanical (MEMS), opto-electronic and optical applications Mater. Sci. Eng. A297 2001 230 234
    • (2001) Mater. Sci. Eng. , vol.297 , pp. 230-234
    • Yan, J.1    Yoshino, M.2    Kuriagawa, T.3    Shirakashi, T.4    Syoji, K.5    Komanduri, R.6
  • 4
    • 14744300028 scopus 로고    scopus 로고
    • Nanoprinting technology
    • M. Nakano Nanoprinting technology IEICE Trans. C J85-C 9 2002 793 802 (Japanese)
    • (2002) IEICE Trans. C , vol.J85-C , Issue.9 , pp. 793-802
    • Nakano, M.1
  • 6
    • 0042192507 scopus 로고    scopus 로고
    • Micro-and sub-micormachining of type II a single crystal diamond using a Ti:sapphire femtosecond laser
    • D. Ramanthan, and P.A. Molian Micro-and sub-micormachining of type II a single crystal diamond using a Ti:sapphire femtosecond laser ASME J. Manuf. Sci. Eng. 124 2 2002 389 396
    • (2002) ASME J. Manuf. Sci. Eng. , vol.124 , Issue.2 , pp. 389-396
    • Ramanthan, D.1    Molian, P.A.2
  • 10
    • 32244432311 scopus 로고    scopus 로고
    • Nano forming of hard-brittle materials by indentation processes
    • M. Yoshino, and N. Fujii Nano forming of hard-brittle materials by indentation processes Ann. M&M JSME 02-25 2002 53 54
    • (2002) Ann. M&M JSME , vol.2 , Issue.25 , pp. 53-54
    • Yoshino, M.1    Fujii, N.2
  • 11
    • 14744299145 scopus 로고    scopus 로고
    • Nano indentation of hard brittle materials
    • S. Aravindan, M. Yoshino, and N. Fujii: Nano indentation of hard brittle materials Proc. JSPE Spring 2003 57
    • (2003) Proc. JSPE , pp. 57
    • Aravindan, S.1    Yoshino, M.2    Fujii, N.3
  • 12
    • 0023646665 scopus 로고
    • Rational modification of enzyme catalysis by engineering surface charge
    • A.J. Russell, and A.R. Fersht Rational modification of enzyme catalysis by engineering surface charge Nature 328 6130 1987 496 500
    • (1987) Nature , vol.328 , Issue.6130 , pp. 496-500
    • Russell, A.J.1    Fersht, A.R.2
  • 13
  • 15
    • 19244368148 scopus 로고    scopus 로고
    • Plasma technique for the fabrication of a durable functional surface on organic polymers
    • M. Kuzuya, T. Sawa, M. Mouri, S.-I. Kondo, and T. Osamu Plasma technique for the fabrication of a durable functional surface on organic polymers Surf. Coat. Technol. 169-170 June (2) 2003 587 591
    • (2003) Surf. Coat. Technol. , vol.169-170 , Issue.2 , pp. 587-591
    • Kuzuya, M.1    Sawa, T.2    Mouri, M.3    Kondo, S.-I.4    Osamu, T.5
  • 17
    • 0000054630 scopus 로고
    • Atomic-scale and microscale friction of graphite and diamond using friction force microscopy
    • J. Ruan, and B. Bhushan Atomic-scale and microscale friction of graphite and diamond using friction force microscopy J. Appl. Phys. 76 1994 5022 5035
    • (1994) J. Appl. Phys. , vol.76 , pp. 5022-5035
    • Ruan, J.1    Bhushan, B.2
  • 18
    • 0034263106 scopus 로고    scopus 로고
    • The effect of texture height and thickness of amorphous carbon nitride coating of a hard disc slider on the friction and wear of the slider against a disk
    • L. Zhou, K. Kato, N. Umehara, and Y. Miyake The effect of texture height and thickness of amorphous carbon nitride coating of a hard disc slider on the friction and wear of the slider against a disk Tribol. Int. 33 2000 665 672
    • (2000) Tribol. Int. , vol.33 , pp. 665-672
    • Zhou, L.1    Kato, K.2    Umehara, N.3    Miyake, Y.4
  • 19
    • 0037289714 scopus 로고    scopus 로고
    • Effect of surface texturing on friction reduction between ceramic and steel materials under lubricated sliding contact
    • W. Wakuda, Y. Yamauchi, S. Kanzaki, and Y. Yasuda Effect of surface texturing on friction reduction between ceramic and steel materials under lubricated sliding contact Wear 254 2003 356 363
    • (2003) Wear , vol.254 , pp. 356-363
    • Wakuda, W.1    Yamauchi, Y.2    Kanzaki, S.3    Yasuda, Y.4
  • 22
    • 0037190949 scopus 로고    scopus 로고
    • Surface characterization of NiTi modified by plasma source ion implantation
    • L. Tan, and W.C. Crone Surface characterization of NiTi modified by plasma source ion implantation Acta Mater. 50 18 2002 4449 4460
    • (2002) Acta Mater. , vol.50 , Issue.18 , pp. 4449-4460
    • Tan, L.1    Crone, W.C.2
  • 23
    • 0042357523 scopus 로고    scopus 로고
    • 2-lubrication of carbon nitride coatings: A review
    • 2-lubrication of carbon nitride coatings: a review Wear 254 2003 1062 1069
    • (2003) Wear , vol.254 , pp. 1062-1069
    • Kato, K.1    Umehara, N.2    Adachi, K.3
  • 25
    • 0000645317 scopus 로고    scopus 로고
    • Broadband antireflection gratings fabricated upon silicon substructures
    • Y. Kanamori, M. Sasaki, and K. Hane Broadband antireflection gratings fabricated upon silicon substructures Opt. Lett. 24 1999 1422 1424
    • (1999) Opt. Lett. , vol.24 , pp. 1422-1424
    • Kanamori, Y.1    Sasaki, M.2    Hane, K.3
  • 26
    • 0032092138 scopus 로고    scopus 로고
    • Negative magnetoresistance in antidot lattices with saddle points
    • R. Hennig, P. Rotter, M. Suhrke, and U. Rossler Negative magnetoresistance in antidot lattices with saddle points Physica B 249-251 1998 321 325
    • (1998) Physica B , vol.249-251 , pp. 321-325
    • Hennig, R.1    Rotter, P.2    Suhrke, M.3    Rossler, U.4
  • 28
    • 0942278363 scopus 로고    scopus 로고
    • Why optical lithography will live forever
    • T.A. Brunner Why optical lithography will live forever J. Vac. Sci. Technol. B21 2003 2632 2637
    • (2003) J. Vac. Sci. Technol. , vol.21 , pp. 2632-2637
    • Brunner, T.A.1
  • 29
    • 0037676514 scopus 로고    scopus 로고
    • High numerical aperture lithographic imagery at the Brewster angle
    • T.A. Brunner High numerical aperture lithographic imagery at the Brewster angle J. Microlith. Microfab., Microsyst. 1 2002 188 196
    • (2002) J. Microlith. Microfab., Microsyst. , vol.1 , pp. 188-196
    • Brunner, T.A.1
  • 30
    • 0034738987 scopus 로고    scopus 로고
    • Pushing the limits of lithography
    • T. Ito, and S. Okazaki Pushing the limits of lithography Nature 406 2000 1027 1034
    • (2000) Nature , vol.406 , pp. 1027-1034
    • Ito, T.1    Okazaki, S.2
  • 31
    • 0037230485 scopus 로고    scopus 로고
    • Enhanced resolution for future fabrication
    • M. Fritze Enhanced resolution for future fabrication IEEE Circuits Devices 19 2003 43 47
    • (2003) IEEE Circuits Devices , vol.19 , pp. 43-47
    • Fritze, M.1
  • 32
    • 0000024936 scopus 로고    scopus 로고
    • Resolution limits of optical lithography
    • S. Okazaki Resolution limits of optical lithography J. Vac. Sci. Technol. B9 2001 2829 2833
    • (2001) J. Vac. Sci. Technol. , vol.9 , pp. 2829-2833
    • Okazaki, S.1
  • 33
    • 0035465562 scopus 로고    scopus 로고
    • PREVAIL-electron projection technology approach for next generation lithography
    • R.S. Dhaliwal PREVAIL-electron projection technology approach for next generation lithography IBM J. Res. Dev. 45 2001 615 638
    • (2001) IBM J. Res. Dev. , vol.45 , pp. 615-638
    • Dhaliwal, R.S.1
  • 34
    • 32244441722 scopus 로고    scopus 로고
    • Glass machining with ball end mill
    • T. Matsumura, and T. Ohno Glass machining with ball end mill Trans. NAMRI/SME 33 2005 319 326
    • (2005) Trans. NAMRI/SME , vol.33 , pp. 319-326
    • Matsumura, T.1    Ohno, T.2
  • 36
    • 0031361459 scopus 로고    scopus 로고
    • Technological advance in fine abrasive processes
    • R. Komanduri, D.A. Lucca, and Y. Tani Technological advance in fine abrasive processes Ann. CIRP 46/2 1997 545 596
    • (1997) Ann. CIRP , vol.46 , Issue.2 , pp. 545-596
    • Komanduri, R.1    Lucca, D.A.2    Tani, Y.3
  • 37
    • 84996265403 scopus 로고
    • Correlation of the coefficient of adhesion with various physical and mechanical properties of metals
    • M.E. Sikorski Correlation of the coefficient of adhesion with various physical and mechanical properties of metals Trans. ASME 85D 1963 279 285
    • (1963) Trans. ASME , vol.85 , pp. 279-285
    • Sikorski, M.E.1
  • 38
    • 0028524289 scopus 로고
    • Network modification of DLC coatings to adjust a defined surface energy
    • K. Trojian, M. Grischke, and H. Gimigen Network modification of DLC coatings to adjust a defined surface energy Physica(a) 145 2 1994 575 585
    • (1994) Physica(a) , vol.145 , Issue.2 , pp. 575-585
    • Trojian, K.1    Grischke, M.2    Gimigen, H.3
  • 40
    • 0014551211 scopus 로고
    • Estimation of the surface free energy of polymers
    • D.K. Owens, and R.C. Wendt Estimation of the surface free energy of polymers J. Appl. Polym. Sci. 13 1969 1741 1747
    • (1969) J. Appl. Polym. Sci. , vol.13 , pp. 1741-1747
    • Owens, D.K.1    Wendt, R.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.