Femtosecond laser ablation of diamond-like carbon films

Applied Surface Science

Volumn 222, Issue 1-4, 2004, Pages 226-233

  Dumitru, Gabriel ^a   Romano, Valerio ^a   Weber, Heinz P ^a   Pimenov, Sergei ^b   Kononenko, Taras ^b   Sentis, Marc ^c   Hermann, J örg ^c   Bruneau, Sébastien ^c  

^a UNIVERSITY OF BERN   (Switzerland)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^c AIX MARSEILLE UNIVERSITY   (France)

Author keywords

Ablation properties; Diamond like carbon; Femtosecond pulses; Structure changes

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CHEMICAL MODIFICATION; ELECTRON ENERGY LEVELS; FILM GROWTH; INTERFEROMETRY; LASER ABLATION; LASER BEAM EFFECTS; OPTICAL MICROSCOPY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; STRUCTURE (COMPOSITION); SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; ULTRASHORT PULSES;

ABLATION PROPERTIES; ANTIREFLECTIVE COATINGS; FEMTOSECOND LASERS; HOT FILAMENT DIODES;

DIAMOND LIKE CARBON FILMS;

EID: 0347383773     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2003.08.031     Document Type: Article

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