High numerical aperture lithographic imagery at the Brewster angle

Journal of Microlithography, Microfabrication and Microsystems

Volumn 1, Issue 3, 2002, Pages 188-196

  Brunner, Timothy A ^a   Seong, Nakgeuon ^a   Hinsberg, William D ^b   Hoffnagle, John A ^b   Houle, Frances A ^b   Sanchez, Martha I ^b  

^a IBM RESEARCH   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

High NA imagery; High NA optics; High resolution lithography; Holographic lithography; Interferometric lithography; Lithography; Microlithography; Polarization; Swing curve

Indexed keywords

EID: 0037676514     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1507337     Document Type: Article

References (14)

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