Micromanipulator system in MEMS

Proceedings of the IEEE International Conference on Industrial Technology

Volumn , Issue , 1996, Pages 665-668

  Li, Luming ^a   Wang, Liding ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; DEGREES OF FREEDOM (MECHANICS); MICROELECTROMECHANICAL DEVICES; MICROSCOPES; MINIATURE INSTRUMENTS; PERSONAL COMPUTERS; ROBOT APPLICATIONS;

MICROEFFECTORS; MICROMANIPULATOR SYSTEMS; MICROROBOTS;

MANIPULATORS;

EID: 0030358669     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)