Novel ion beam tools for nanofabrication

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Volumn , Issue , 2005, Pages 703-706

  Ji, Q ^a   Jiang, X ^a,b   Ji, L ^a,b   Chen, Y ^a,b   Akker, B V D ^c   Leung, K N ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Etcheverry Hall MCI 730   (United States)

^c SAN FRANCISCO STATE UNIVERSITY   (United States)

Author keywords

Focused ion beam; Ion beam imprinter; Ion projection lithography; Maskless lithography

Indexed keywords

FOCUSED ION BEAMS; ION BEAM IMPRINTER; ION PROJECTION LITHOGRAPHY; MASKLESS LITHOGRAPHY;

GALLIUM; INTEGRATED CIRCUITS; ION BEAM LITHOGRAPHY; MACHINE TOOLS; NANOTECHNOLOGY;

ION BEAMS;

EID: 32144457551     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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13. th International conference on the application of accelerators in research & industry, October 10-15, 2004, Texas, USA.