Electro-thermal simulations and modelling of micromachined gas sensor

2001 Microelectromechanical Systems Conference, MEMS 2001

Volumn , Issue , 2002, Pages 99-102

  Demirci, T ^a   Guney, D ^a   Bozkurt, A ^a   Gurbuz, Y ^a  

^a SABANCI UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; FINITE ELEMENT METHOD; GAS DETECTORS; MEMBRANES; MEMS; MICROMECHANICS; STRESSES;

ACTIVE AREA; ELECTRO-THERMAL SIMULATION; MECHANICAL STRESS; MEMS TECHNOLOGY; MICROMACHINED GAS SENSOR; SELECTION OF MATERIALS; STACKED LAYER; SUPPLY VOLTAGES;

CHEMICAL SENSORS;

EID: 50049091171     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSC.2001.992752     Document Type: Conference Paper

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