High performance Pirani vacuum gauge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 13, Issue 6, 1995, Pages 2972-2979

  Shie, Jin Shown ^a   Chou, Bruce C S ^a   Chen, Yeong Maw ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009224857     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579623     Document Type: Article

References (17)

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