Comparison of different micromechanical vacuum sensors

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 181-188

  Bedö, Gerlinde ^a   Kraus, Werner ^a   Müller, Rudolf ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

PROBES; SANDWICH STRUCTURES; SILICON NITRIDE; THIN FILMS;

MICROMECHANICAL VACUUM SENSORS; TEMPERATURE MODULATIONS;

MICROSENSORS;

EID: 0034248418     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00383-6     Document Type: Article

References (12)

1. Wutz M., Adam H., Walcher W. Theorie und Praxis der Vakuumtechnik. Theory and Practice of Vacuum Theory 4 Aulfage:1988;Vieweg Verlag Braunschweig, Wiesbaden.
2. Stephan K., Mayinger F. Thermodynamik. Grundlagen und technische Anwendungen. Thermodynamics. Fundamentals and Technical Applications:1986;Springer-Verlag, Berlin.
3. R. Aigner, Systemeigenschaften von Silicium-Planar-Pellistoren (Properties of Silicon Planar Pellistors), Diss. Technische Universität München, 1996.
4. B. Bayha, Monolithische Integration von thermisch modulierten Drucksensoren (Monolithic Integration of Thermal Modulated Pressure Sensors), thesis from the Lehrstuhl für Technische Elektronik, Technische Universität München, 1998.
5. S. van Herwaarden, Thermal Vacuum Sensors Based on Integrated Silicon Thermopiles, Diss. Techn. Univ. Delft, 1987.
6. Klaassen E.H., Kovacs G.T.A. Integrated thermal-conductivity vacuum sensors. Sens. Actuators, A. 58:1997;37-42.
7. F. Mayinger, J. Straub, Manuals for the Lecture Wärme- und Stoffübertragung held at the Technische Universität München.
8. Pupp W., Hartmann H.K. Vakuumtechnik. 1991;Carl Hanser, München, Wien.
9. Chou B.C.S., Chen Y.-M., Ou-Yang M., Shie J.-S. A sensitive Pirani vacuum sensor and the electrothermal SPIVE modelling. Sens. Actuators, A. 53:1996;273-277.
10. Weng P.K., Shie J.S. Micro-Pirani vacuum gauge. Rev. Sci. Instrum. 65:1994;492-499.
11. van Herwaarden A.W., Sarro P.M. Integrated vacuum sensor. Sens. Actuators, A. 8:1985;187-196.
12. Robinson A.M., Haswell P., Lawson R.P., Parameswaran M. A thermal conductivity microstructural pressure sensor fabricated in standard complementary metal-oxide semiconductor. Rev. Sci. Instrum. 63:1992;2026-2029.