Experimental study of capillary effect in porous silicon using micro-Raman spectroscopy and x-ray diffraction

Chinese Physics Letters

Volumn 21, Issue 7, 2004, Pages 1377-1380

  Lei, Zhen Kun ^a   Kang, Yi Lan ^a   Qiu, Yu ^a   Hu, Ming ^a   Cen, Hao ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

RAMAN SPECTROSCOPY; RESIDUAL STRESSES; X RAY DIFFRACTION;

CAPILLARY EFFECTS; DRIVING FORCES; IRREVERSIBLE OXIDATION; LATTICE EXPANSION; MICRO RAMAN SPECTROSCOPY; OXIDATION EFFECTS; POROUS SILICON LAYERS; STRESS EVOLUTION; TENSILE RESIDUAL STRESS; WETTING-DRYING;

POROUS SILICON;

EID: 3142726558     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/21/7/054     Document Type: Article

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