Crystallisation kinetics and density profiles in ultra-thin hafnia films: Crystallisation and structure of HfO2 films

European Physical Journal B

Volumn 39, Issue 2, 2004, Pages 273-277

  Van Der Lee, A ^a   Durand, J ^a   Blin, D ^b,d   Holliger, Ph ^c   Martin, F ^c  

^a UNIVERSITÉ DE MONTPELLIER   (France)

^b ASM France   (France)

^c CEA LETI   (France)

^d Jusung Europe   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; CONTAMINATION; CRYSTALLIZATION; DEPOSITION; DIFFRACTION; KINETIC THEORY; REFLECTOMETERS;

CRYSTALLINE ORIENTATION; INTERSURFACE STRUCTURES; NANOSCALE MATERIALS;

ULTRATHIN FILMS;

EID: 3142676819     PISSN: 14346028     EISSN: None     Source Type: Journal    
DOI: 10.1140/epjb/e2004-00190-1     Document Type: Article

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